¹                                          ²                                    ³                                              ⁴                      ⁵                      ⁶                        ⁷              ,           ⁸                         ⁹                                ¹⁰                            ¹¹                                     ¹²                         ¹³                                       ¹⁴                              ¹⁵                          ,           ¹⁶                    ,               ¹⁷        '                ' ¹⁸                                    ¹⁹                                        ²⁰                         